On December 9, 2025, the group standard "Technical Specification for Semiconductor-Grade Ozone Generators" (T/CIET 1946-2025), the first domestic standard in China's semiconductor industry led by Guolin Semiconductor, was officially released and implemented. The development of this standard promotes the standardized development of the industry, drives technological innovation and industrial chain collaboration, and provides a scientific quantitative basis for the selection and application of ozone equipment in the semiconductor and panel display industries.

I. Filling the Gap in Domestic Semiconductor Ozone Standards and Promoting the Standardization of Critical Semiconductor Equipment

With the rapid development of the global semiconductor industry, the demand for standardization and localization of critical process equipment has become increasingly prominent. As an indispensable process equipment in semiconductor manufacturing, ozone generators play a vital role in key processes such as thin film deposition, cleaning, and photoresist stripping, and their technical performance and reliability directly impact chip manufacturing yields.

For a long time, China has lacked unified technical standards in the field of semiconductor-grade ozone generators, which has constrained the standardized development and independent innovation of the industry. To address this, Guolin Semiconductor leveraged its technological leadership to initiate the development of the group standard "Technical Specification for Semiconductor-Grade Ozone Generators," filling the gap in domestic standards by establishing a comprehensive technical indicator system and reliability specifications.

II. Consolidating Industry Strength and Jointly Promoting Standard Implementation

Throughout 2025, with Guolin Semiconductor as the primary lead unit, a total of 17 organizations collaborated on the development, discussion, and review of the standard. These included the Standardization Working Committee of the China International Economic Promotion Association, Beijing Naura Microelectronics Equipment Co., Ltd., Hwatsing Technology Co., Ltd., Piotech Chuangyi (Shenyang) Semiconductor Equipment Co., Ltd., Beijing Electronic Control Integrated Circuit Manufacturing Co., Ltd., Shanghai Btipower Semiconductor Energy Technology Co., Ltd., Beijing Superpower Integrated Circuit Technology Innovation Center Co., Ltd., Shengji Semiconductor Technology (Wuxi) Co., Ltd., ACM Research (Shanghai), Inc., Hangzhou Xingyuanchi Semiconductor Co., Ltd., Jiangsu Yadian Technology Co., Ltd., Shanghai Zhicheng System Integration Co., Ltd., Zhejiang Qier Electromechanical Technology Co., Ltd., Shanghai Zhengfan Technology Co., Ltd., Tianjin Orsman New Energy Technology Co., Ltd., and Shandong Zhiwei Environmental Protection Technology Co., Ltd. This collaboration, encompassing numerous well-known enterprises in critical semiconductor components, equipment, and end-user applications, ensured the scientific rigor, applicability, and industry representativeness of the standard.

• March 5, 2025: Standard work approved and project initiated.

• March – August 2025: Standard drafting and public consultation.

• August 27, 2025: Review meeting for the "Technical Specification for Semiconductor-Grade Ozone Generators" group standard.

• September 19, 2025: Submission and reporting of the "Technical Specification for Semiconductor-Grade Ozone Generators" group standard completed.

• December 9, 2025: The "Technical Specification for Semiconductor-Grade Ozone Generators" group standard officially released and implemented.

III. Leading Development with Standards and Advancing the Localization of Semiconductor Ozone Equipment

Moving forward, Qingdao Guolin Semiconductor will continue to rely on its technological R&D capabilities and industrialization experience to actively participate in the development of standard systems for critical semiconductor equipment and promote the standardization of high-end domestic equipment. Taking the implementation of this standard as an opportunity, the company will continuously optimize product performance, provide more reliable and efficient localized solutions for the global semiconductor industry, and contribute to the high-quality development of China's semiconductor ozone equipment.