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Semiconductor High Concentration Ozonated Water System

Semiconductor grade high concentration ozonated water system is developed and designed specifically for semiconductor industry applications, the system adopts high concentration, ultra-pure ozone generation and mixed control technology. The selection of high quality, ultra-pure ozone resistant materials for the system has achieved ozone water output concentration of more than 100ppm. This device has the advantages of fast output speed and controllable flow, which can meet the needs of the semiconductor industry.

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Product Features

Ozone water output is stable

Ultra-pure high-efficiency mixing and control technology

Ozone concentration output speed is fast

Ultra-pure material process manufacturing



  • Customer Service Center


  • 7×24 year-round service

    2 hours response, 24 hours at the scene.(In China mainland)

  • Active intelligent service

    Complete customer profiles providing proactive services

  • Expert considerate service

    We have long-term cooperation with experts of ozone technology.

  • Upgrade

    Cooperate with client to upgrade relevant equipment in the ozone generation system.