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Electronic Grade Ultrapure Ozone Gas Generator

The ozone implementation technology using high purity, ultra purity, and deep precision processes is the foundation for the implementation of this ozone generator. The CFB-ODSN series ozone generator can generate ultra-pure ozone with high concentration, high flow rate and high pressure, which can output ozone concentration up to 300mg/L, meeting the needs of the semiconductor industry. The equipment is characterized by overall modularity, compact structure, simplicity, and visual appearance.

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Product Features

High ozone concentration

High ozone output pressure

High gas flow

Using ultrapure ozone generation technology



  • Customer Service Center


  • 7×24 year-round service

    2 hours response, 24 hours at the scene.(In China mainland)

  • Active intelligent service

    Complete customer profiles providing proactive services

  • Expert considerate service

    We have long-term cooperation with experts of ozone technology.

  • Upgrade

    Cooperate with client to upgrade relevant equipment in the ozone generation system.