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Ozone Gas Delivery System

Ozone gas delivery system can produce super pure and reliable ozone gas. In a clean semiconductor environment, thin film deposition processes such as atomic layer deposition (ALD) and etching (ALE) are realized by ozone gas reaction. High purity and high concentration ozone gas can produce higher film density, so as to improve the output, performance and reliability of products.

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Product Features

High ozone concentration

High gas flow

Using ultrapure generation technology

Nitrogen-free blending technology



  • Customer Service Center


  • 7×24 year-round service

    2 hours response, 24 hours at the scene.(In China mainland)

  • Active intelligent service

    Complete customer profiles providing proactive services

  • Expert considerate service

    We have long-term cooperation with experts of ozone technology.

  • Upgrade

    Cooperate with client to upgrade relevant equipment in the ozone generation system.